Minimizing scattering from antireflective surfaces replicated from low-aspect-ratio black silicon
نویسندگان
چکیده
منابع مشابه
HIGH ASPECT RATIO SiLICON NANOFABRICATION (HARSiN)
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2012
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4754691